Poster Session P5

[P5-17] Phase transformation of VO_x thin films in reactive multi-pulse HiPIMS of vanadium in Ar/O₂ gas mixtures

*Erdong Chen¹, Tamaki Hattori¹, Naoto Saito¹, Grégory Savorianakis², Daniel Lundin³, Stephanos Konstantinidis², Tetsuhide Shimizu^1,3 (1. Tokyo Metropolitan University, 2. University of Mons, 3. Linköping University)