Poster Session P5

[P5-29] A new method for rapid synthesis of diamond like carbon at low temperature

*Yu-Ting Chow¹, Cheng-Hsun-Tony Chang², Pei-Cheng Jiang³ (1. Department of Semiconductor and Electro-Optical Technology, Minghsin University of Science and Technology, 2. Department of Electronic Engineering, Minghsin University of Science and Technology, 3. Department of Mechanical Engineering, Minghsin University of Science and Technology)