Poster Session P5

[P5-33] Understoichiometric ZrB_2-x films prepared by High Power Impulse Magnetron Sputtering (HiPIMS)

*Viktor Šroba¹, Tomáš Fiantok², Martin Truchlý², Tomáš Roch¹, Branislav Grančič¹, Katarína Viskupová¹, Leonid Satrapinskyy¹, Peter Švec Jr.³, Štefan Nagy⁴, Vitalii Izai², Peter Kúš¹, Marián Mikula^1,4 (1. Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava, Mlynská Dolina F2, 842 48 Bratislava, Slovakia, 2. Detached Workplace of Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava, Sadová, 1148 Turany, Slovakia, 3. Institute of Physics, Slovak Academy of Sciences, Dúbravská cesta 9, 845 11 Bratislava, Slovakia, 4. Institute of Materials and Machine Mechanics Slovak Academy of Sciences, Dúbravská cesta 9, 845 11 Bratislava, Slovakia)