ISSP2024

Presentation information

Oral Presentation

2.Sputtering and Plasma Process Technologies

Oral Session SP2

Fri. Jul 5, 2024 2:50 PM - 4:40 PM Room O (Science Hall)

3:20 PM - 3:40 PM

[SP2-02] Can Sputtering Be Used as a High-Rate Deposition Technique
for Surface Passivation Layer in Silicon Solar Cells?

*Shasha Li1, Shinsuke Miyajima1 (1. Tokyo Institute of Technology)

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