Room temperature synthesis of ferroelectric Hf1-xZrxO2 films under layer-by-layer approach using digitally processed DC sputtering

Daiki Yamashita

9:40 AM - 10:00 AM

[TH2-02] Room temperature synthesis of ferroelectric Hf_1-xZr_xO₂ films under layer-by-layer approach using digitally processed DC sputtering

Daiki Yamashita¹, Yuki Takamatsu¹, Satoshi Fujiya¹, Koki Takamura¹, Shinichiro Saisho^1,2, *Hideo Isshiki¹ (1. The University of Electro-Communications, 2. Shincron Co. Ltd.)

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Presentation information

Oral Session TH2

[TH2-02] Room temperature synthesis of ferroelectric Hf_1-xZr_xO₂ films under layer-by-layer approach using digitally processed DC sputtering

Password

Presentation information

Oral Session TH2

[TH2-02] Room temperature synthesis of ferroelectric Hf1-xZrxO2 films under layer-by-layer approach using digitally processed DC sputtering

Password

[TH2-02] Room temperature synthesis of ferroelectric Hf_1-xZr_xO₂ films under layer-by-layer approach using digitally processed DC sputtering