Oral Session TH2

[TH2-02] Room temperature synthesis of ferroelectric Hf_1-xZr_xO₂ films under layer-by-layer approach using digitally processed DC sputtering

Daiki Yamashita¹, Yuki Takamatsu¹, Satoshi Fujiya¹, Koki Takamura¹, Shinichiro Saisho^1,2, *Hideo Isshiki¹ (1. The University of Electro-Communications, 2. Shincron Co. Ltd.)