Poster session 1

[26-PO-27] Growth Mechanisms of Nanostructured Carbon Films Induced by Different Particles

Zelong Hu¹, Tanghong Zhou¹, *Xue Fan², Dongfeng Diao² (1. Institute of Nanosurface Science and Engineering, Shenzhen University, China, 2. State Key Laboratory of Radio Frequency Heterogeneous Integration, Institute of Nanosurface Science and Engineering, Shenzhen University, China)

Keywords:Nanostructured carbon film, Particle irradiation, Growth mechanism