Poster session 1

[26-PO-27] Growth Mechanisms of Nanostructured Carbon Films Induced by Different Particles

Zelong Hu¹, Tanghong Zhou¹, *Xue Fan², Dongfeng Diao² (1. Institute of Nanosurface Science and Engineering, Shenzhen University, China, 2. State Key Laboratory of Radio Frequency Heterogeneous Integration, Institute of Nanosurface Science and Engineering, Shenzhen University, China)

キーワード：Nanostructured carbon film, Particle irradiation, Growth mechanism