Poster session 2

[27-PO-01] Wet and Adhesion Properties of Three-dimensional Artificially-designed Silicon Micro-structures

*Sai Hasegawa^1,2, Yasunari Kimoto¹, Nimatil Mabarroh¹, Daisetsu Toh³, Azusa N. Hattori³, Ken Hattori¹ (1. Nara Institute of Science and Technology, Japan, 2. TORAY Research Center, Inc., Japan, 3. Osaka Univ., Japan)

キーワード：contact angle, adhesion, silicon lithography