Poster session 2

[27-PO-21] Tribo Induced Phase Change in a-C:H Films Studied by Raman Spectroscopy

Kenji Kisoda¹, *Noriyuki Hasuike², Ryosuke Abe³, Tsukuru Kinoshita³, Hideo Fukumura³ (1. Wakayama University, Japan, 2. Kyoto Institute of Technology, Japan, 3. Sumitomo Heavy Industries, Japan)

キーワード：Raman spectroscopy, a-C:H