DLC and Carbon Related Coatings 3

[29-C-01] Improved Tribological Vacuum and Dry Air Performance of ta-C Coatings Modified with Different Process Strategies

*Fabian Härtwig^1,2, Stefan Makowski², Lars Lorenz^1,2, Robert Baumann¹, Marcos Soldera¹, Andrés Fabián Lasagni¹, Frank Kaulfuß², Volker Weihnacht² (1. Technische Universität Dresden, Germany, 2. Fraunhofer Institute for Material and Beam Technology IWS, Germany)

キーワード：DLC, Vacuum, DLIP, MoS2