[Mon-A1] Vacuum Vision 2030

2022年9月12日(月) 13:15 〜 15:15 Room A (Main Hall)

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13:15 〜 13:30

[Mon-A1-1] NIST on a Chip: Quantum-Based Measurements for Pressure and Vacuum

*Jay H Hendricks¹, Barbara Goldstein¹ (1. NIST (United States of America))

13:30 〜 13:45

[Mon-A1-2] Development of an ISO Technical Specification of a new type of ionization vacuum gauge suitable as reference standard

*Karl Joseph Jousten¹, Matthias Bernien¹, Claus Illgen¹, Janez Setina², Martin Wüest³ (1. Physikalisch-Technische Bundesanstalt (PTB) (Germany), 2. Insitute of Metals (Slovenia), 3. INFICON AG (Liechtenstein))

13:45 〜 14:00

[Mon-A1-3] BeCu - WATMASS GA System

*Sam Kishikawa¹, Masahide Kuroiwa¹ (1. Tokyo Electronics Co., Ltd. (Japan))

14:00 〜 14:15

[Mon-A1-4] Green technologies for vacuum system on WFE

*Yohei Yoda¹, Shinichi Sekiguchi¹ (1. EBARA Corporation (Japan))

14:15 〜 14:45

[Mon-A1-5I] Vacuum control technology for semiconductor manufacturing equipment

*Yusuke Sano¹, Akihiro Ito¹ (1. CKD CORPORATION (Japan))

14:45 〜 15:15

[Mon-A1-6I] Plasma Process: Nemesis, Rival or Friend?

*Manabu Tsujimura¹ (1. Ebara Corporation (Japan))

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