Parallel Sessions
Vacuum Vision 2030
Mon. Sep 12, 2022 3:30 PM - 5:30 PM Room A (Main Hall)
3:30 PM - 4:15 PM
*Yoshihisa Kagawa1, Hayato Iwamoto1 (1. Sony Semiconductor Solutions Corporation (Japan))
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4:15 PM - 4:45 PM
*Ton van der Net1 (1. ASML (Netherlands))
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4:45 PM - 5:00 PM
Naoto Kameda1, Soichiro Motoda1, Takayuki Hagiwara1, *Ken Nakamura2, Hidehiko Nonaka2 (1. MEIDEN NANOPROCESS INNOVATIONS, Inc. (Japan), 2. AIST (Japan))
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5:00 PM - 5:30 PM
*Hitoshi Wakabayashi1 (1. Tokyo Tech (Japan))
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