1:15 PM - 1:30 PM
*Annas Bin Ali1, Matthias Bernien 1, Janez Setina2, Karl Jousten1 (1. Physikalisch-Technische Bundesanstalt, Braunschweig and Berlin, Germany (Germany), 2. IMT Institute of Metals and Technology (Slovenia))
Parallel Sessions
Vacuum Science and Technology
Mon. Sep 12, 2022 1:15 PM - 3:15 PM Room D (Mid-sized Hall B)
1:15 PM - 1:30 PM
*Annas Bin Ali1, Matthias Bernien 1, Janez Setina2, Karl Jousten1 (1. Physikalisch-Technische Bundesanstalt, Braunschweig and Berlin, Germany (Germany), 2. IMT Institute of Metals and Technology (Slovenia))
1:30 PM - 1:45 PM
*Takao Nakamura1, Masahide Kuroiwa2, Shinsuke Kishikawa2, Ryuichiro Kamei3 (1. Institute of Industrial Science, The University of Tokyo, 2. Tokyo Electronics Co. Ltd., 3. Seinan Industry Co. Ltd.)
1:45 PM - 2:00 PM
*Risa Naruse1, Sakae Inayoshi1 (1. ULVAC, Inc. (Japan))
2:00 PM - 2:15 PM
*Naoki Ogawa1, Hiroki Kurisu2, Setsuo Yamamoto2 (1. RORZE Corporation (Japan), 2. Univ. of Yamaguchi (Japan))
2:15 PM - 2:30 PM
*Verena Velthaus1,2, Christina Trautmann1,2, Markus Bender1,3 (1. GSI Helmholtzzentrum fuer Schwerionenforschung (Germany), 2. Technische Universitaet Darmstadt (Germany), 3. Hochschule RheinMail (Germany))
2:30 PM - 2:45 PM
*Katharina Battes1, Christian Day1, Volker Hauer1 (1. Karlsruhe Institute of Technology (KIT) (Germany))
2:45 PM - 3:15 PM
*James Fedchak1 (1. National Institute of Standards and Technology (United States of America))
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