[Mon-D1] Vacuum Science and Technology -- Outgassing, Adsorption, Desorption

2022年9月12日(月) 13:15 〜 15:15 Room D (Mid-sized Hall B)

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13:15 〜 13:30

[Mon-D1-1] Reference samples for traceable outgassing rate measurements

*Annas Bin Ali¹, Matthias Bernien ¹, Janez Setina², Karl Jousten¹ (1. Physikalisch-Technische Bundesanstalt, Braunschweig and Berlin, Germany (Germany), 2. IMT Institute of Metals and Technology (Slovenia))

13:30 〜 13:45

[Mon-D1-2] Characterization of small vacuum process vessels made of 0.2% Be-Cu material

*Takao Nakamura¹, Masahide Kuroiwa², Shinsuke Kishikawa², Ryuichiro Kamei³ (1. Institute of Industrial Science, The University of Tokyo, 2. Tokyo Electronics Co. Ltd., 3. Seinan Industry Co. Ltd.)

13:45 〜 14:00

[Mon-D1-3] Analysis of outgassing using both TD-GC/MS and TDS

*Risa Naruse¹, Sakae Inayoshi¹ (1. ULVAC, Inc. (Japan))

14:00 〜 14:15

[Mon-D1-4] Vacuum Performance of a Semiconductor Wafer Handling System made by Aluminum Alloy with Low Outgassing Surface Finish

*Naoki Ogawa¹, Hiroki Kurisu², Setsuo Yamamoto² (1. RORZE Corporation (Japan), 2. Univ. of Yamaguchi (Japan))

14:15 〜 14:30

[Mon-D1-5] Award Applied
Mitigation of swift heavy ion induced desorption by pre-cleaning and thermal annealing processes

*Verena Velthaus^1,2, Christina Trautmann^1,2, Markus Bender^1,3 (1. GSI Helmholtzzentrum fuer Schwerionenforschung (Germany), 2. Technische Universitaet Darmstadt (Germany), 3. Hochschule RheinMail (Germany))

14:30 〜 14:45

[Mon-D1-6] Alternative structural materials and their outgassing behaviour

*Katharina Battes¹, Christian Day¹, Volker Hauer¹ (1. Karlsruhe Institute of Technology (KIT) (Germany))

14:45 〜 15:15

[Mon-D1-7I] Outgassing, Desorption, and Gas Uptake Studies: Our path towards UHV and XHV standards, with some interesting detours

*James Fedchak¹ (1. National Institute of Standards and Technology (United States of America))

セッション情報

[Mon-D1] Vacuum Science and Technology -- Outgassing, Adsorption, Desorption

[Mon-D1-1] Reference samples for traceable outgassing rate measurements

[Mon-D1-2] Characterization of small vacuum process vessels made of 0.2% Be-Cu material

[Mon-D1-3] Analysis of outgassing using both TD-GC/MS and TDS

[Mon-D1-4] Vacuum Performance of a Semiconductor Wafer Handling System made by Aluminum Alloy with Low Outgassing Surface Finish

[Mon-D1-5] Award Applied
Mitigation of swift heavy ion induced desorption by pre-cleaning and thermal annealing processes

[Mon-D1-6] Alternative structural materials and their outgassing behaviour

[Mon-D1-7I] Outgassing, Desorption, and Gas Uptake Studies: Our path towards UHV and XHV standards, with some interesting detours

認証

セッション情報

[Mon-D1] Vacuum Science and Technology -- Outgassing, Adsorption, Desorption

[Mon-D1-1] Reference samples for traceable outgassing rate measurements

[Mon-D1-2] Characterization of small vacuum process vessels made of 0.2% Be-Cu material

[Mon-D1-3] Analysis of outgassing using both TD-GC/MS and TDS

[Mon-D1-4] Vacuum Performance of a Semiconductor Wafer Handling System made by Aluminum Alloy with Low Outgassing Surface Finish

[Mon-D1-5] Award AppliedMitigation of swift heavy ion induced desorption by pre-cleaning and thermal annealing processes

[Mon-D1-6] Alternative structural materials and their outgassing behaviour

[Mon-D1-7I] Outgassing, Desorption, and Gas Uptake Studies: Our path towards UHV and XHV standards, with some interesting detours

認証

[Mon-D1-5] Award Applied
Mitigation of swift heavy ion induced desorption by pre-cleaning and thermal annealing processes