*Xiaodi Su¹ (1. Institute of Materials Research and Engineering, Agency for Science Technology and Research (A*STAR), 138634, Singapore (Singapore))

*Masahiro Ueda¹, Toshinori Shimanouchi¹, Yukitaka Kimura¹ (1. Okayama University (Japan))

*Mana Toma¹, Shinnosuke Namihara¹, Yuji Itakura¹, Kotaro Kajikawa¹ (1. Tokyo Institute of Technology (Japan))

*Yui Matsushita¹, Satoki Kubota², Takuya Matsumoto², Ken-ichi Amano³, Tomoko Hirayama⁴, Hiroshi Onishi², Ryugo Tero¹ (1. Toyohashi University of Technology (Japan), 2. Kobe University Kobe (Japan), 3. Meijo University Nagoya (Japan), 4. Kyoto University Kyoto (Japan))

*Kazuo Umemura¹, Naysan Lin¹, Yuki Ide¹ (1. Tokyo University of Science (Japan))

*Shi Ting Lee¹, Thasaneeya Kuboki¹, Satoru Kidoaki¹, Yukiko Aida¹, Yusuke Arima¹, Kaoru Tamada¹ (1. Institute for Materials Chemistry and Engineering, Kyushu University (Japan))

*Atsuya Matsui¹, Jean Pierre Bellier¹, Daiki Hayashi¹, Hiroyasu Taguchi¹, Nobuyasu Naruse¹, Yutaka Mera¹ (1. Shiga University of Medical Science (Japan))

*Akihiro Shirouzu¹, Ryo Sasamoto¹, Masahiro Hanai², Masanori Shinohara² (1. Graduate School of Electrical Engineering Fukuoka University (Japan), 2. Department of Electrical Engineering Fukuoka University (Japan))

*Ying Hung Chen¹, Ping Yen Hsieh¹, Yu Han Wei¹, Ju Liang He¹ (1. Feng Chia University (Taiwan))

*Hiroharu Kawasaki¹, Tamiko Ohshima¹, Yoshihito Yagyu¹, Takeshi Ihara¹, Yusuke Hibino¹, Yoshiaki Suda¹, Takahiko Satake^1,2, Shin-ichi Aoqui² (1. National Institute of Technology, Sasebo College (Japan), 2. Sojo University (Japan))

*Atsuya Kuwada¹, Tatsuo Nakai¹, Ryo Sasamoto¹, Masanori Shinohara², Takashi Matsumoto³, Satoshi Tanaka³ (1. Graduate school of engineering, Fukuoka University (Japan), 2. Department of Electrical Engineering, Fukuoka University (Japan), 3. Tokyo Electron Technology Solutions Limited (Japan))

*Stanislav Novak¹, Rudolf Hrach, Jakub Palacky², Tomas Ibehej², Vera Hrachova² (1. JE Purkinje Univ. (Czech Republic), 2. Charles Univ. (Czech Republic))

*Jose Gabriel Faustino Abalos¹, Arnold Rey B. Gines², Allen Vincent B. Catapang¹, Motoi Wada¹ (1. Graduate School of Science and Engineering, Doshisha University, Kyotanabe (Japan), 2. Institute for Advanced Research and Education, Doshisha University (Japan))

*Mayuko Nishiwaki¹, Mamiko Sasao², Motoi Wada¹, Haruhisa Nakano³, Katsuyoshi Tsumori³ (1. Graduate School of Science and Engineering, Doshisha Univ. (Japan), 2. Organization for Promotion of Research and Development, Doshisha Univ. (Japan), 3. NIFS (Japan))

*Tamaki Hattori¹, Naoto Saito¹, Ming Yang¹, Stephanos Konstantinidis², Tetsuhide Shimizu¹ (1. Graduate School of Systems Design, Tokyo Metropolitan University (Japan), 2. Plasma-Surface Interaction Chemistry(ChIPS), University of Mons (Belgium))

Hayate Nagakura¹, Yuya Anzai¹, Miki Kikuta¹, Ming Yang¹, *Tetsuhide Shimizu¹ (1. Tokyo Metropolitan University (Japan))

Keita Miyasaka¹, *Yasushi Inoue¹, Osamu Takai² (1. Chiba Institute of Technology (Japan), 2. Kanto Gakuin University (Japan))

*Hiroshi Toyota¹ (1. Hiroshima Institute of Technology (Japan))