4:30 PM - 4:45 PM
*Stefan Kiesel1, Andreas Trützschler1, Klaus Bergner1 (1. VACOM Vakuum Komponenten & Messtechnik GmbH (Germany))
Parallel Sessions
Vacuum Science and Technology
Wed. Sep 14, 2022 4:30 PM - 6:30 PM Room D (Mid-sized Hall B)
4:30 PM - 4:45 PM
*Stefan Kiesel1, Andreas Trützschler1, Klaus Bergner1 (1. VACOM Vakuum Komponenten & Messtechnik GmbH (Germany))
4:45 PM - 5:00 PM
*Fumiaki Ishigure1, Sakae Inayoshi1, Yoshiaki Yamamoto1, Hiroshi Sato2 (1. ULVAC Inc. (Japan), 2. ULVAC TECHNO Inc. (Japan))
5:00 PM - 5:15 PM
*Freek Molkenboer1, Han Velthuis1, Peter Kerkhof1, Arjan Burema1, Hans Haasnoot1, Thijs Hooftman1, Henk Lensen1 (1. TNO (Netherlands))
5:15 PM - 5:30 PM
*Yoichiro Neo1, Gai Hashimoto1, Rei Koike1, Takahiro Matsumoto2 (1. Shizuoka university (Japan), 2. Nagoya City University (Japan))
5:30 PM - 6:00 PM
*Katsuhisa Murakami1 (1. National Institute of Advanced Industrial Science and Technology (Japan))
6:00 PM - 6:15 PM
*Koki Matsukawa1, Hirohide Katsuta1, Yuiko Nakashima1, Yoshinori Takao1 (1. Yokohama National University (Japan))
6:15 PM - 6:30 PM
*Takumi Shingu1,2, Masayoshi Nagao2, Katsuhisa Murakami2, Hiromasa Murata2, Yoshinori Takao1 (1. Yokohama National University (Japan), 2. National Institute of Advanced Industrial Science and Technology (Japan))
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