*Stefan Kiesel¹, Andreas Trützschler¹, Klaus Bergner¹ (1. VACOM Vakuum Komponenten & Messtechnik GmbH (Germany))

*Fumiaki Ishigure¹, Sakae Inayoshi¹, Yoshiaki Yamamoto¹, Hiroshi Sato² (1. ULVAC Inc. (Japan), 2. ULVAC TECHNO Inc. (Japan))

*Freek Molkenboer¹, Han Velthuis¹, Peter Kerkhof¹, Arjan Burema¹, Hans Haasnoot¹, Thijs Hooftman¹, Henk Lensen¹ (1. TNO (Netherlands))

*Yoichiro Neo¹, Gai Hashimoto¹, Rei Koike¹, Takahiro Matsumoto² (1. Shizuoka university (Japan), 2. Nagoya City University (Japan))

*Katsuhisa Murakami¹ (1. National Institute of Advanced Industrial Science and Technology (Japan))

*Koki Matsukawa¹, Hirohide Katsuta¹, Yuiko Nakashima¹, Yoshinori Takao¹ (1. Yokohama National University (Japan))

*Takumi Shingu^1,2, Masayoshi Nagao², Katsuhisa Murakami², Hiromasa Murata², Yoshinori Takao¹ (1. Yokohama National University (Japan), 2. National Institute of Advanced Industrial Science and Technology (Japan))