IVC-22

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Parallel Sessions

Vacuum Vision 2030

[Mon-A2] Vacuum Vision 2030

Mon. Sep 12, 2022 3:30 PM - 5:30 PM Room A (Main Hall)

5:00 PM - 5:30 PM

[Mon-A2-4I] Overview of advanced and future semiconductor devices for integrated circuits achieved by vacuum processes

*Hitoshi Wakabayashi1 (1. Tokyo Tech (Japan))

Keywords:FinFET, GAA-NS-FET, pn-stacked FETs, TMDC, Green

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