IVC-22

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Parallel Sessions

Electronic Materials and Processing

[Mon-B2] Electronic Materials and Processing

Mon. Sep 12, 2022 3:30 PM - 5:30 PM Room B (Conference Hall)

4:45 PM - 5:00 PM

[Mon-B2-5] Award Applied
MOVPE Homoepitaxial Growth on N-polar Annealed Sputter-Deposited AlN Films

*Gaku Namikawa1, Kanako Shojiki1,2, Riku Yoshida1, Kenjiro Uesugi1, Hideto Miyake1 (1. Mie Univ. (Japan), 2. Osaka Univ. (Japan))

Keywords:III-nitride semiconductor, AlN, N-polarity, Sputtering, MOVPE, TEM

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