[Mon-B2] Electronic Materials and Processing

[Mon-B2-7] Synchrotron and XPS spectroscopies studies of Al and Ga heterostructures on SiO₂/3C-SiC (111)

*Ana Gomes SILVA¹, João Fonseca², Tatyana Bendikov³, Zheshen Li⁴, Kjeld Pedersen⁵ (1. NOVA School of Science and Technology, FCT-NOVA (Portugal), 2. NOVA School of Science and Technology, FCT-NOVA (Portugal), 3. Department of Chemical Research Support, Weizmann Institute of Science (Israel), 4. Physics and Astronomy Department, Aarhus University (Denmark), 5. Aalborg University (Denmark))

キーワード：SiC 90 nm, ultra-thin oxides, Ga2O3, Heterostructures, Al2O3