[Mon-D1] Vacuum Science and Technology -- Outgassing, Adsorption, Desorption

[Mon-D1-1] Reference samples for traceable outgassing rate measurements

*Annas Bin Ali¹, Matthias Bernien ¹, Janez Setina², Karl Jousten¹ (1. Physikalisch-Technische Bundesanstalt, Braunschweig and Berlin, Germany (Germany), 2. IMT Institute of Metals and Technology (Slovenia))

キーワード：outgassing, quadrupole mass spectrometers , reference samples , Traceability