IVC-22

Presentation information

Parallel Sessions

Thin Film

[Mon-G1] Thin Film

Mon. Sep 12, 2022 1:15 PM - 3:15 PM Room G (Small Hall)

2:30 PM - 2:45 PM

[Mon-G1-5] Diamond-like Carbon Synthesized by Photoemission-Assisted PECVD

*Susumu Takabayashi1 (1. National Institute of Technology, Ariake College (Japan))

Keywords:Diamond-like carbon (DLC)

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