<strong>Laser reflection as an in-situ tool to monitor the condition of surfaces during vacuum-based cleaning or coating processes</strong>

4:45 PM - 5:00 PM

[Mon-G2-5] Laser reflection as an in-situ tool to monitor the condition of surfaces during vacuum-based cleaning or coating processes

*Christoph Eisenmenger-Sittner¹, Andreas Eder², Lukas Thajer¹ (1. Vienna University of Technology (Austria), 2. Miba HTC (Austria))

Keywords:process monitoring, thin film deposition, sputter cleaning, laser reflection

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