[Mon-G2] Thin Film

[Mon-G2-5] Laser reflection as an in-situ tool to monitor the condition of surfaces during vacuum-based cleaning or coating processes

*Christoph Eisenmenger-Sittner¹, Andreas Eder², Lukas Thajer¹ (1. Vienna University of Technology (Austria), 2. Miba HTC (Austria))

キーワード：process monitoring, thin film deposition, sputter cleaning, laser reflection