IVC-22

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Parallel Sessions

Thin Film

[Mon-G2] Thin Film

Mon. Sep 12, 2022 3:30 PM - 5:30 PM Room G (Small Hall)

5:15 PM - 5:30 PM

[Mon-G2-7] 3D-deposition of Metal Vapor based on Desorption from Soft Organofluorine Surfaces

*Tsuyoshi Tsujioka1, Hatsuka Kusaka1 (1. Osaka Kyoiku University (Japan))

Keywords:Vacuum deposition, Three dimensional deposition, Metal atom desoption , Organofluorine surface, selective metal deposition

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