[Mon-G2] Thin Film

[Mon-G2-7] 3D-deposition of Metal Vapor based on Desorption from Soft Organofluorine Surfaces

*Tsuyoshi Tsujioka¹, Hatsuka Kusaka¹ (1. Osaka Kyoiku University (Japan))

キーワード：Vacuum deposition, Three dimensional deposition, Metal atom desoption , Organofluorine surface, selective metal deposition