[Mon-H1] Plasma Science and Technologies

[Mon-H1-4] Modeling of high power impulse magnetron sputtering (HiPIMS) discharges with graphite target

*Jon Tomas Gudmundsson^1,2, Henrik Eliasson³, Martin Rudolph⁴, Kateryna Barynova¹, Nils Brenning^2,3, Michael A. Raadu², Hamidreza Hajihoseini⁵, Daniel Lundin³ (1. University of Iceland (Iceland), 2. KTH Royal Institute of Technology (Sweden), 3. Linköping University (Sweden), 4. Leibniz Institute of Surface Engineering (IOM) (Germany), 5. University of Twente (Netherlands))

Keywords:high power impulse magnetron sputtering (HiPIMS), magnetron sputtering, carbon, DLC