[Mon-H1] Plasma Science and Technologies

[Mon-H1-7] Characteristics of 150 kHz Band High Power Burst Inductively Coupled Nitrogen Plasma

*Hikaru Suenaga¹, Hisaki Kikuchi¹, Seiji Mukaigawa¹, Katsuyuki Takahashi^1,2, Koichi Takaki^1,2 (1. Faculty of Science and Engineering, Iwate University (Japan), 2. Agri-Innovation Center, Iwate University (Japan))

キーワード：Inductively coupled plasma, Pulsed plasma, Burst mode, Nitrogen