[Mon-I2] Data-driven materials science and process informatics

[Mon-I2-2] The spectrum adapted maximum a posteriori (MAP) expectation–conditional maximization (ECM) algorithm for the high-throughput analysis in X-ray photoelectron spectroscopy

*Tarojiro Matsumura¹, Naoka Nagamura², Shotaro Akaho¹, Kenji Nagata², Yasunobu Ando¹ (1. National Institute of Advanced Industrial Science and Technology (AIST) (Japan), 2. Research Center for Advanced Measurement and Characterization, National Institute for Materials Science (NIMS) (Japan))

Keywords:Peak fitting method, high-throughput analysis, ECM algorithm, X-ray photoelectron spectroscopy