[Mon-PO1A] Poster Session (17:30-19:00) Category A

[Mon-PO1A-12] Comparison between synthesis rates of ammonia in inductively coupled nitrogen/water vapor and nitrogen/hydrogen plasmas

*JIn Takahashi¹, Takeshi Ito¹, Koichi Sasaki¹ (1. Division of Applied Quantum Science and Engineering, Hokkaido University (Japan))

Keywords:ammonia, inductively coupled plasma, nitrogen, water vapor