[Mon-PO1A] Poster Session (17:30-19:00) Category A

[Mon-PO1A-17] Light Scattering Properties and Evaluation Method of Low-RefractiveIndex SiO₂ Optical Thin Films Prepared by Combination Coating by Sputtering and Electron Beam Deposition

*Kosuke Endo¹, Taisei Wakamiya¹, Hiroshi Murotani¹, Takayuki Matsudaira² (1. Tokai Univ. (Japan), 2. Shincron Co., Ltd. (Japan))

キーワード：Thin film、Light scattering、SiO2、Sputtering、Electron Beam Deposition