[Mon-PO1A] Poster Session (17:30-19:00) Category A

[Mon-PO1A-20] Formation of Isolated Spherical or Flat-topped Grains in Ag thin film deposition by magnetron sputtering

*Eiji Kusano¹ (1. Kanazawa Institute of Technology (Japan))

キーワード：Sputtering , Film Structure, Silver thin film