[Mon-PO1B] Poster Session (17:30-19:00) Category B

[Mon-PO1B-1] Measurement Apparatus to Obtain Electrical Characteristics of GeO₂/Ge Structures Exposed to Controlled Amount of H₂O Molecules

*Shuto Sano¹, Yohei Wada¹, Kentaro Kawai¹, Kazuya Yamamura¹, Kenta Arima¹ (1. Osaka Univ. (Japan))

Keywords:germanium oxide, metal-oxide-semiconductor structure, adsorbed water film, capacitance-voltage characteristics, vacuum