[Mon-PO1B] Poster Session (17:30-19:00) Category B

[Mon-PO1B-18] Creation of three-dimensional Si lined structures with atomically flat {111} faceted surfaces

*Wataru Imayama¹, Yuya Sakai¹, Takaaki Higashi¹, Aydar Irmikimov¹, Haobang Yang¹, Liliany N. Pamasi¹, Azusa N. Hattori², Ai I. Osaka², Hidekazu Tanaka², Ken Hattori¹ (1. Nara Institute of Science and Technology (Japan), 2. Univ. of Osaka (Japan))

Keywords:Three-dimensional Si structure surfaces, lithography, etching, LEED, SEM