[Mon-PO1B] Poster Session (17:30-19:00) Category B

[Mon-PO1B-25] Award Applied
Multivariate analysis of SIMS data depending on the energy per atom of Ar cluster projectile

*Ken Mizuhata¹, Kousuke Moritani¹, Tetsuro Masumoto¹, Tomomichi Nakamura², Norio Inui¹ (1. University of Hyogo Graduate School of Engineering (Japan), 2. University of Hyogo Graduate School of Information Science (Japan))

Keywords:SIMS