[Mon-PO1C] Poster Session (17:30-19:00) Category C

[Mon-PO1C-4] Award Applied
Atomic layer deposition of magnesium fluoride thin films for optical applications

*Yuma Sugai¹, Toshihiko Sato¹, Hironori Sugata¹, Yohei Sakano¹, Satoshi Okuyama¹, Takuya Sugawara¹, Muhammad Safdar², Jani Hämäläinen², Tommi Suni² (1. SHINCRON CO,.LTD. (Japan), 2. Picosun Oy (Finland))

Keywords:Atomic layer deposition, MgF2