[Mon-PO1C] Poster Session (17:30-19:00) Category C

[Mon-PO1C-26] Development of multiple-axes controlled RHEED system for reciprocal space mapping of three-dimensional structure surfaces.

*Yuki Ida¹, Tomoya Shimizu¹, Yoshihiro Kitagawa³, Shunta Takahashi¹, Liliany N. Pamasi¹, Azusa N. Hattori², Ai I. Osaka², Hidekazu Tanaka², Hiroki Momono³, Ken Hattori¹ (1. Nara Institute of Science and Technology (Japan), 2. SANKEN, Osaka University (Japan), 3. Yonago College (Japan))

Keywords:three-dimensional structure surfaces, three-dimensional reciprocal space mapping, multiple-axes controlled RHEED, reciprocal lattice rods, side and facet surfaces