[Mon-PO1D] Poster Session (17:30-19:00) Category D

[Mon-PO1D-5] Award Applied
Controlled Doping into Diamond-like Carbon by Photoemission-Assisted Townsend Discharge Plasma

*Hisashi Koga¹, Ryuta Tsukazaki¹, Susumu Takabayashi¹ (1. National Institute of Technology, Ariake College (Japan))

キーワード：Diamond-like carbon (DLC)