[Mon-PO1D] Poster Session (17:30-19:00) Category D

[Mon-PO1D-7] Relationship between droplet density and internal stress in CrN films deposited by AIP method

*Kazuya Kusaka¹, Morio Kawasaki¹, Daisuke Yonekura¹ (1. Tokushima University (Japan))

Keywords:Chromium nitride film, Internal stress, Surface observation, Crystal orientation, X-ray diffraction