Epitaxial growth of deep UV-transparent and conductive Sn1−xGexO2 thin films doped with Ta

Tetsuya Hasegawa

[Mon-PO1D-10] Epitaxial growth of deep UV-transparent and conductive Sn_1−xGe_xO₂ thin films doped with Ta

*Tetsuya Hasegawa^1,2, Yo Nagashima¹, Michitaka Fukumoto¹, Masato Tsuchii¹, Yuki Sugisawa³, Daiichiro Sekiba³, Yasushi Hirose^1,4 (1. Univ. of Tokyo (Japan), 2. Ochanomizu Univ. (Japan), 3. Univ. of Tsukuba (Japan), 4. Tokyo Metropolitan Univ. (Japan))

キーワード：Epitaxial thin film, UV transparent conductor

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講演情報

[Mon-PO1D] Poster Session (17:30-19:00) Category D

[Mon-PO1D-10] Epitaxial growth of deep UV-transparent and conductive Sn_1−xGe_xO₂ thin films doped with Ta

講演情報

[Mon-PO1D] Poster Session (17:30-19:00) Category D

[Mon-PO1D-10] Epitaxial growth of deep UV-transparent and conductive Sn1−xGexO2 thin films doped with Ta

[Mon-PO1D-10] Epitaxial growth of deep UV-transparent and conductive Sn_1−xGe_xO₂ thin films doped with Ta