[Mon-PO1D] Poster Session (17:30-19:00) Category D

[Mon-PO1D-12] Generation and evaluation of boron mixed carbon thin films by vacuum arc deposition

*Taichi Ishida¹, Kunpei Sato¹, Masayuki Yoshimoto², Michikazu Kinsho², Motoi Wada¹ (1. Graduate School of Science and Engineering, Doshisha University (Japan), 2. J-PARC Center (Japan Atomic Energy Agency) (Japan))

キーワード：a vacuum arc discharge, Electron Cyclotron Resonance