IVC-22

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Poster Session

Poster Session (17:30-19:00)

[Mon-PO1E] Poster Session (17:30-19:00) Category E

Mon. Sep 12, 2022 5:30 PM - 7:00 PM Room E (Main Hall)

[Mon-PO1E-6] MFIG-A mass filtered ion gauge

*Herman Bekman1, Youyou Westland1, Dorus Elstgeest1, Thomas Mechielsen1, Michael Haye1, Jurjen Emmelkamp1, Freek Molkenboer1, Norbert Koster1, Henk Lensen1 (1. TNO (Netherlands))

Keywords:Contamination sensor, Molecular mass filter, Vacuum metrology, RGA, Yield

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