[Mon-PO1E] Poster Session (17:30-19:00) Category E

[Mon-PO1E-6] MFIG-A mass filtered ion gauge

*Herman Bekman¹, Youyou Westland¹, Dorus Elstgeest¹, Thomas Mechielsen¹, Michael Haye¹, Jurjen Emmelkamp¹, Freek Molkenboer¹, Norbert Koster¹, Henk Lensen¹ (1. TNO (Netherlands))

キーワード：Contamination sensor, Molecular mass filter, Vacuum metrology, RGA, Yield