[Mon-PO1E] Poster Session (17:30-19:00) Category E

[Mon-PO1E-9] Compression Ratio on the Novel Designed Dry Screw Pump

*Satsuki Yamazaki¹, Toshio Suzuki¹, Atsushi Morihira¹, Tomonari Tanaka¹ (1. Components Division, ULVAC, Inc. (Japan))

キーワード：screw vacuum pump, compression ratio, back-diffusion, high vacuum, medium vacuum, pressure, clearance, positive displacement vacuum pump, volume flow rate