[Mon-PO1E] Poster Session (17:30-19:00) Category E

[Mon-PO1E-14] Characterization of Ti Non-Evaporable Getter Films Prepared by UHV Sputtering Method

*Ryosuke Tsuchida¹, Md. Suruz Mian¹, Takeo Nakano¹, Takashi Kikuchi², Kazuhiko Mase^2,3 (1. Graduate School of Science and Technology, Seikei University (Japan), 2. Institute of Materials Structure Science, KEK (Japan), 3. Department of Materials Structure Science, SOKENDAI (Japan))

キーワード：Non-Evaporable Getter, NEG, Vacuum, Thin Film