[Mon-PO1F] Poster Session (17:30-19:00) Category F

[Mon-PO1F-7] Award Applied
In-situ TEM observation of mechanical deformation in silicon by nanoindentation

*TONGMIN CHEN¹, Yoshifumi Oshima¹ (1. Japan Advanced Institute of Science and Technology (Japan))

キーワード：nanoindentation, dislocation, Silicon