IVC-22

Presentation information

Print

Parallel Sessions

Vacuum Science and Technology

[Thu-D1] Vacuum Science and Technology -- Vacuum Measurements, Diagnostics

Thu. Sep 15, 2022 10:15 AM - 12:15 PM Room D (Mid-sized Hall B)

10:15 AM - 11:00 AM

[Thu-D1-1K] Vacuum Pressure Measurement in the Semiconductor Industry

*Martin Wuest1 (1. INFICON AG (Liechtenstein))

Keywords:Vacuum pressure measurement, Semiconductor industry, Capacitance diaphragm gauge, Pirani gauge, Ionization Gauge, Optical Emission Spectroscopy

Please log in with your participant account.
» Participant Log In