Investigation of electron emission behavior of Ta cathode of novel ionization gauge in CO, CO2 and O2

Presentation information

Parallel Sessions

Vacuum Science and Technology

Thu. Sep 15, 2022 10:15 AM - 12:15 PM Room D (Mid-sized Hall B)

11:15 AM - 11:30 AM

*Tim Verbovsek¹, Janez Setina¹ (1. Institute of Metals and Technology (Slovenia))

Keywords:ionization gauge, tantalum cathode, thermionic emission

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