[Thu-D1] Vacuum Science and Technology -- Vacuum Measurements, Diagnostics

[Thu-D1-5] Award Applied
Measurement of deformation coefficient of Fabry–Pérot cavity using two gas method in optical pressure standard

*Yoshinori Takei¹, Hajime Yoshida¹, Souichi Telada¹, Youichi Bitou¹, Tokihiko Kobata¹ (1. National Institute of Advanced Industrial Science and Technology (AIST)/National Metrology Institute of Japan (NMIJ) (Japan))

Keywords:Vacuum standard, Optical pressure standard , Primary pressure standard, Fabry–Pérot cavity